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Wing Zin Low
Wing Zin Low
Compatibility (mechanics)
Q factor
Structural material
Resonance
Analytical chemistry
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POLY-SIGE: A HIGH-Q STRUCTURAL MATERIAL FOR INTEGRATED RF MEMS
2002
Sunil A. Bhave
Brian L. Bircumshaw
Wing Zin Low
Yong-Sang Kim
Albert P. Pisano
Tsu-Jae King
Roger T. Howe
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