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Masis M. Mkrtchyan
Masis M. Mkrtchyan
Bell Labs
Lithography
Scattering
Randomization
Monte Carlo method
Statistical physics
4
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48
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Mark topography for alignment and registration in projection electron lithography
1996
R. C. Farrow
Masis M. Mkrtchyan
Kevin Bolen
Myrtle I. Blakey
Christopher Biddick
L. A. Fetter
H.A. Huggins
Regine G. Tarascon-Auriol
Steven D. Berger
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Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations
1995
Masis M. Mkrtchyan
Steven D. Berger
James Alexander Liddle
L. R. Harriott
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Stochastic scattering in charged particle projection systems: A nearest neighbor approach
1995
Journal of Applied Physics
Masis M. Mkrtchyan
James Alexander Liddle
Steven D. Berger
L. R. Harriott
J. M. Gibson
A. M. Schwartz
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Citations (36)
Electron-optical design for the SCALPEL proof-of-concept tool
1995
Warren K. Waskiewicz
Steven D. Berger
L. R. Harriott
Masis M. Mkrtchyan
Stephen W. Bowler
J. M. Gibson
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Citations (9)
1