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Nikolai Kasper
Nikolai Kasper
Analytical chemistry
Wafer
Materials science
Detector
MOSFET
2
Papers
8
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0
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2024
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A holistic metrology sensitivity study for pattern roughness quantification on EUV patterned device structures with mask design induced roughness
2018
Shimon Levi
Ishai Swrtsband
Vladislav Kaplan
Ilan Englard
Kurt G. Ronse
Bogumila Kutrzeba Kotowska
Gaoliang Dai
Frank Scholze
Kenslea Anne
Hayley Johanesen
Laurens Kwakman
Igor Turovets
Maxim Rabinovitch
Sven Krannich
Nikolai Kasper
Brid Connolly
Romy Wende
Markus Bender
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Citations (1)
Application of inline high resolution x-ray diffraction in monitoring Si/SiGe and conventional Si in SOI fin-shaped field effect transistor processes
2012
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Pui Yee Hung
Nikolai Kasper
Jim Nadeau
Injo Ok
C. Hobbs
Assunta Vigliante
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Citations (7)
1