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Michael Darwin
Michael Darwin
Zygo Corporation
Metrology
Optics
Interference microscopy
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Rigorous coupled-wave analysis
3
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26
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Interference Microscopy For Semiconductor Back End Patterning Metrology
2009
Xavier Colonna de Lega
Martin F. Fay
Ryan Kruse
David Grigg
Michael Darwin
Matthew Knowles
John Barnak
Maruko Wu
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Interferometre, et procede de mesure des caracteristiques d'elements de surface sans resolution optique
2006
Peter de Groot
Michael Darwin
Robert Stoner
Gregg M. Gallatin
Xavier Colonna de Lega
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