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Alexandre Tarnowka
Alexandre Tarnowka
Defence Evaluation and Research Agency
Ellipsometry
Metrology
Surface roughness
Calibration
Wafer
2
Papers
1
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0
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Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool
2001
Characterization and Metrology for ULSI Technology
Pierre Boher
Christopher Pickering
Alexandre Tarnowka
Jean-Philippe Piel
Patrick Evrard
Jean Louis Stehle
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Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool
2000
Pierre Boher
Christopher Pickering
Alexandre Tarnowka
Jean-Philippe Piel
Patrick Evrard
Jean-Louis P. Stehle
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1