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Hidekazu Matsugi
Hidekazu Matsugi
Ion implantation
Dopant
Electronic engineering
Silicon
Materials science
2
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1
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Effect of Ion Flux in Source-Drain Extension Ion Implantation for 10-nm Node FinFet and beyond on 300/450mm Platforms
2016
Ming-Yi Shen
Adarsh Basavalingappa
Takeshi Hayakawa
Hidekazu Matsugi
Christopher L. Borst
Stock Chang
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MILD system: Maskless implantation for local doping
2012
Shiro Ninomiya
Yasuharu Okamoto
Akihiro Ochi
Toshio Yumiyama
Hidekazu Matsugi
Hajime Taroura
Yoshiaki Ookita
Mitsukuni Tsukihara
Genshu Fuse
Kazuyoshi Ueno
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