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Nobuyuki Yoshioka
Nobuyuki Yoshioka
Mitsubishi
Phase (waves)
Electronic engineering
Optics
Materials science
Optoelectronics
4
Papers
3
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0
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2024
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Advanced process with magnetically enhanced RIE for phase-shifting mask fabrication
1993
Satoshi Aoyama
Haruhiko Kusunose
Minoru Hanazaki
Nobuyuki Yoshioka
Yaichiro Watakabe
Atsushi Hayashi
Akihiko Isao
Yasuo Tokoro
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Practical attenuated phase-shifting mask with a single-layer absorptive shifter of MoSiO and MoSiON for ULSI fabrication
1993
IEDM | International Electron Devices Meeting
Nobuyuki Yoshioka
Junji Miyazaki
Haruhiko Kusunose
K. Hosono
M. Nakajima
Hiroaki Morimoto
Yaichiro Watakabe
Katsuhiro Tsukamoto
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