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W. Seng
W. Seng
Auburn University
Substrate (chemistry)
Analytical chemistry
Gallium arsenide
Plasma
Etching
1
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Temperature dependent electron cyclotron resonance etching of InP, GaP, and GaAs
1996
Journal of Vacuum Science and Technology
R. J. Shul
A. J. Howard
C. B. Vartuli
Peter A. Barnes
W. Seng
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Citations (43)
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