Old Web
English
Sign In
Acemap
>
authorDetail
>
Sam Liu
Sam Liu
ASML Holding
Computer science
Process window
Chip
Lithography
Limiter
3
Papers
1
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Real time process monitoring using diffraction-based overlay measurements from YieldStar
2020
Henry Chen
Jimmy Chang
Sheng-Tsung Tsao
Junjun Zhang
Jie Du
Congcong Fan
Alex Huang
David Xu
Sam Liu
Liang Wu
Kimi Yang
Ning Gu
Liping Ren
Jian Wu
Alexander Tan
Sunny Xia
Ivan Mao
Show All
Source
Cite
Save
Citations (0)
Full-chip application of machine learning SRAFs on DRAM case using auto pattern selection
2019
K.-C. Chen
Andy Lan
Richer Yang
Vincent Chen
Shulu Wang
Stella Zhang
Xiang-ru Xu
Andy Yang
Sam Liu
Xiaolong Shi
Angmar Li
Stephen Hsu
Stanislas Baron
Gary Zhang
Rachit Gupta
Show All
Source
Cite
Save
Citations (1)
Freeform mask optimization using advanced image based M3D inverse lithography and 3D-NAND full chip OPC application
2018
Sam Liu
Jingjing Liu
Andy Yang
Moran Guo
Jun He
Longxia Guo
Xiaolong Shi
Leon Liu
Ninging Jia
Stephen Hsu
Yaobin Feng
Rafael Howell
Rachit Gupta
Cuiping Zhang
Junwei Lu
Jun Wang
Austin Peng
Zero Li
Victor Peng
Gang Xu
Zhiyang Song
Show All
Source
Cite
Save
Citations (0)
1