Old Web
English
Sign In
Acemap
>
authorDetail
>
Paul Terbeek
Paul Terbeek
Metrology
Accuracy and precision
Gauge (firearms)
Critical dimension
Feed forward
1
Papers
4
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Improvement in total measurement uncertainty for gate CD control
2005
Proceedings of SPIE
Benjamin Bunday
Osman Sorkhabi
Youxian Wen
Ajit Paranjpe
Paul Terbeek
John Allgair
Amy Peterson
Show All
Source
Cite
Save
Citations (4)
1