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K. Tokai
K. Tokai
Fraunhofer Society
Photolithography
Diffraction grating
Nanoimprint lithography
Optics
Interference lithography
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Development of NIL processes for PV applications
2015
Proceedings of SPIE
Hubert Hauser
Nico Tucher
K. Tokai
Patrick Schneider
Ch. Wellens
Anne-Kristin Volk
S. Barke
Claas Müller
Thomas Glinsner
Benedikt Bläsi
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