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Sweeney Joseph
Sweeney Joseph
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Applied Materials VIISta高電流注入装置上でのホウ素注入のための四フッ化二ホウ素(B 2 F 4 )のビーム電流改善と線源寿命性能
2012
Tang Ying
J Bassom Neil
Young James
Sweeney Joseph
Ray Richard
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