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Takeshi Nishibe
Takeshi Nishibe
AZ Electronic Materials
Photochemistry
Nanotechnology
Depth of focus
Exposure technique
Lithography
2
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2
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Contact Hole Resist Solutions for 45-90nm Node Design Rules
2004
Journal of Photopolymer Science and Technology
Murirathna Padmanaban
Takamori Kudo
Guanyang Lin
SungEun Hong
Takeshi Nishibe
Yusuke Takano
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