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Ken Atsumi
Ken Atsumi
Tokyo Institute of Technology
Electronic engineering
Proof mass
Electrode
Accelerometer
Microelectromechanical systems
3
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A 100-nG/√ Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes
2020
DTIP | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Takashi Ichikawa
Ken Atsumi
Tatsuya Koga
Hiroyuki Ito
Shinichi Iida
Noboru Ishihara
Daisuke Yamane
Katsuyuki Machida
Kazuya Masu
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A 3-D Parallel-Plate MEMS Accelerometer with a Gold Proof Mass
2019
MEMS | International Conference on Micro Electro Mechanical Systems
Daisuke Yamane
Shota Otobe
Ken Atsumi
Tatsuya Koga
Toshifumi Konishi
Teruaki Safu
Shinichi Iida
Hiroyuki Ito
Noboru Ishihara
Katsuyuki Machida
Kazuya Masu
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Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers
2019
DTIP | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Ken Atsumi
Shota Otobe
Tatsuya Koga
Takashi Ichikawa
Daisuke Yamane
Shinichi Iida
Hiroyuki Ito
Noboru Ishihara
Masato Sone
Katsuyuki Machida
Kazuya Masu
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