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Jang-Ik Park
Jang-Ik Park
Samsung
Ellipsometry
Scanning electron microscope
Metrology
Reflectometry
Beam (structure)
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High-resolution in-die metrology using beam profile reflectometry and ellipsometry
2007
Proceedings of SPIE
Chung Sam Jun
Jang-Ik Park
Jon Opsal
Heath Pois
InKyo Kim
JungWook Kim
Lena Nicolaides
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