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Steve Scheer
Steve Scheer
Polymer
Nanotechnology
Extreme ultraviolet lithography
Resist
Materials science
2
Papers
1
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0
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EUV RLS performance tradeoffs for a polymer bound PAG resist process
2009
Ben Rathsack
Josh Hooge
Mark Somervell
Steve Scheer
Kathleen Nafus
Hideo Shite
Neil Bradon
Junichi Kitano
Roel Gronheid
Alessandro Vaglio Pret
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ISS Microgravity Analytical Model Correlation and Update
2003
Steve Del Basso
Ed Okeefe
Steve Scheer
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