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Hyo-Jin O
Hyo-Jin O
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CF4/Ar 유도결합플라즈마의 저 유전상수 SiCOH 박막 식각에 미치는 RF 파워의 영향
2012
Hun Bae Kim
Hyo-Jin O
Chae Min Lee
Myeong Hun Ha
Ji-Su Park
Dae-Won Park
Dong Geun Jeong
Hui-Yeop Chae
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