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Renate Jaritz
Renate Jaritz
Leica Microsystems
Bottleneck
Engineering drawing
Lithography
Electronic engineering
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MSB for ILT masks
2011
Juergen Gramss
U. Weidenmueller
Arnd Stoeckel
Renate Jaritz
Hans-Joachim Doering
Monika Boettcher
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Multi-shaped beam data preparation
2010
U. Weidenmueller
Hans-Joachim Doering
Renate Jaritz
D. Melzer
Arnd Stoeckel
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Data prep: the bottleneck of future applications?
2006
Juergen Gramss
Hans Eichhorn
Melchior Lempke
Renate Jaritz
Volker Neick
Dirk Beyer
Bertram Buerger
Ulrich Baetz
Klaus Kunze
Nikola Belic
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