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Sergey Vychub
Sergey Vychub
Beam diameter
Laser beam quality
M squared
Gaussian
Gaussian beam
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Gaussian beam writing strategy: accuracy of using the shape beam simulator SELID for Gaussian beam systems
2005
J.-H. Tortai
J. Thiault
R. Tiron
L. Mollard
Stephan Haefele
Sergey Vychub
John Lewellen
Peter Brooker
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E-beam lithography experimental results and simulation for the 45-nm node
2004
John Nistler
Chia-Jen Chen
Sergey Vychub
Hsin-Chang Lee
Lee-Chih Yeh
Hung-Chang Hsieh
Christoph Sambale
Ulrich Hofmann
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