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Satoshi Sasaki
Satoshi Sasaki
Osaka Electro-Communication University
Wafer
Light scattering
Materials science
Optics
Particle
7
Papers
7
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Development of a Measuring Instrument for Nanoparticles on the Si Wafer Using a Laser Light Scattering Method
2006
Hiroshi An
Satoshi Sasaki
Katsuyoshi Endo
Yuzo Mori
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Detection accuracy evaluation of the measuring system for nano-particles using standard nano-particle
2005
Satoshi Sasaki
Katsuyoshi Endo
Yuzo Mori
Hiroshi An
Masanori Nishii
Takeshi Uemura
Mamoru Mizawa
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Measurement of Micro-Roughness on Si Wafer Surface Using System for Measuring Particle Diameter by Light-Scattering Method
2004
Satoshi Sasaki
Hiroshi An
Katsuyoshi Endo
Yuzo Mori
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Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method.
2001
Journal of The Japan Society for Precision Engineering
Satoshi Sasaki
Hiroshi An
Yuzo Mori
T. Kataoka
Katsuyoshi Endo
Kazuto Yamauchi
Haruyuki Inoue
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Evaluation of particles on a Si wafer before and after cleaning using a new laser particle counter
2000
ISSM | International Symposium on Semiconductor Manufacturing
Satoshi Sasaki
H. An
Y. Mori
T. Kataoka
K Endo
Haruyuki Inoue
K. Yamauchi
S. Mizuhara
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Citations (5)
Designing a New Apparatus for Measuring Particle Sizer of Nanometer Order by Light-Scattering. (5th Report). Evaluation of the Surface by Measuring Particles on a Si Wafer before and after Cleaning.
1999
Journal of The Japan Society for Precision Engineering
Hiroshi An
Satoshi Sasaki
Yuzo Mori
Toshiyuki Kataoka
Katsuyoshi Endo
Haruyuki Inoue
Kazuto Yamauchi
Hiroyuki Taniguchi
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