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Windsor E. Owens
Windsor E. Owens
Optics
Analytical chemistry
Photocathode
Electron-beam lithography
Lithography
3
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51
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Modular MEMS design and fabrication for an 80 x 80 transparent optical cross-connect switch
2004
Andres Fernandez
Bryan P. Staker
Windsor E. Owens
Lawrence P. Muray
James Spallas
William Banyai
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Citations (12)
Basic constraints for a multibeam lithography column
2001
Journal of Vacuum Science & Technology B
Marian Mankos
Steven T. Coyle
Andres Fernandez
Allan L. Sagle
Windsor E. Owens
Jeffrey S. Sullivan
T. H. P. Chang
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Citations (13)
Multisource optimization of a column for electron lithography
2000
Journal of Vacuum Science & Technology B
Marian Mankos
Steven T. Coyle
Andres Fernandez
Allan L. Sagle
Paul C. Allen
Windsor E. Owens
Jeffrey S. Sullivan
T. H. P. Chang
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Citations (26)
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