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Ryan C. J. Chen
Ryan C. J. Chen
Ellipsometry
Metrology
Repeatability
Development environment
Electronic engineering
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Application of optical CD metrology based on both spectroscopic ellipsometry and scatterometry for Si-recess monitor
2006
Peter C. Y. Huang
Ryan C. J. Chen
Fang-Cheng Chen
Baw-Ching Perng
Jyu-Horng Shieh
Syun-Ming Jang
M.S. Liang
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