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R. Dubi
R. Dubi
Cymer, Inc.
Semiconductor device
Laser
Amplifier
Excimer laser
Lithography
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High power 120W ArF immersion XLR laser system for high dose applications
2013
Proceedings of SPIE
Rostislav Rokitski
Robert J. Rafac
John T. Melchior
R. Dubi
Joshua Thornes
Theodore Cacouris
Mary Haviland
Daniel Brown
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