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Obert R. Wood
Obert R. Wood
Optics
Extreme ultraviolet lithography
Materials science
image based
Metrology
2
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A Method of Image-Based Aberration Metrology for EUVL Tools
2015
Zac Levinson
Sudhar Raghunathan
Erik Verduijn
Obert R. Wood
Pawitter Mangat
Kenneth A. Goldberg
Markus P. Benk
Antoine Wojdyla
Vicky Philipsen
Eric Hendrickx
Bruce W. Smith
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Actinic inspection of multilayer coated EUV masks at the ALS
2005
Obert R. Wood
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