author-photo

C. Martinet

CNET

4

Papers

47

Citations

Citation Trend

Filter By

Papers (4) Sort By

Journal Conference Others

Oxidation of crystalline Si in an O2 plasma: Growth kinetics and oxide characterization

1997 Journal of Applied Physics
Show All
- Source
- Cite
- Save
Citations (27)
Infrared evidence for inhomogeneity in SiO2 films grown by plasma assisted oxidation of Si

1995 Applied Physics Letters
- C. Martinet
- R.A.B. Devine
Show All
- Source
- Cite
- Save
Citations (4)
LOW-TEMPERATURE OXIDATION OF SI IN A MICROWAVE ELECTRON CYCLOTRON RESONANCE EXCITED O2 PLASMA

1995 Applied Physics Letters
- C. Martinet
- R.A.B. Devine
Show All
- Source
- Cite
- Save
Citations (10)
New dry-development process of trilayer resist systems for advanced lithography

1993
Show All
- Source
- Cite
- Save
Citations (6)