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Toshiharu Tsubata
Toshiharu Tsubata
Piezoelectric coefficient
Piezoelectric motor
Ultrasonic motor
Ultrasonic sensor
Piezoelectricity
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Ultrasonic Linear Motor Using Multilayer Piezoelectric Actuators
1995
Japanese Journal of Applied Physics
Tomoki Funakubo
Toshiharu Tsubata
Yoshihisa Taniguchi
Kazuhiro Kumei
Takanao Fujimura
Chikara Abe
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