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Ui-Jeong Ha
Ui-Jeong Ha
Hanyang University
Distortion
Optics
Materials science
Extreme ultraviolet lithography
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Pattern dependent distortion and temperature variation in EUV mask
2019
Chung-Hyun Ban
Eun-Sang Park
Ui-Jeong Ha
Chae-Yun Lim
Hye-Keun Oh
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