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Katuyoshi Kojima
Katuyoshi Kojima
Proximity effect (audio)
Optics
Electron-beam lithography
Lithography
Laser linewidth
1
Papers
7
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0
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2024
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Recent progress in electron-beam cell projection technology
1996
Japanese Journal of Applied Physics
Hiroshi Yamashita
Hiroshi Nozue
Eiichi Nomura
Katsuyuki Itoh
Takahiro Ema
Satomi Hirasawa
Katuyoshi Kojima
Takao Tamura
Ken Nakajima
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Citations (7)
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