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Benedicte P. Mortini
Benedicte P. Mortini
Microlens
Optics
Grayscale
Lithography
Materials science
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Grayscale lithography process study for sub 5µm microlens patterns
2019
Nacima Allouti
Chevalier (Pierre)
Sébastien Bérard-Bergery
Valérie Rousset
Benedicte P. Mortini
Patrick Quéméré
Florian Tomaso
Rémi Coquand
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