author-photo

Annamaria Votta

STMicroelectronics

3

Papers

0

Citations

Citation Trend

Filter By

Papers (3) Sort By

Journal Conference Others

Copper Catalysis Effect Investigation for TiW Etch Process on Patterned Wafers

2021 Solid State Phenomena
Show All
- Source
- Cite
- Save
Citations (0)
AlCu Pitting Prevention in Post Etch Cleaning

2018 Solid State Phenomena
Show All
- Source
- Cite
- Save
Citations (0)
Post CMP Wet Cleaning Influence on Cu Hillocks

2016 Solid State Phenomena
Show All
- Source
- Cite
- Save
Citations (0)