author-photo

A. R. Ellingboe

Dublin City University

32

Papers

322

Citations

Citation Trend

Filter By

Papers (23) Sort By

Journal Conference Others

Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge

2018 Physics of Plasmas
Show All
- Source
- Cite
- Save
Citations (20)
Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

2018 Physics of Plasmas
Show All
- Source
- Cite
- Save
Citations (29)
Electronegative plasma diagnostic by laser photo-detachment combined with negatively biased Langmuir probe

2018 Physics of Plasmas
Show All
- Source
- Cite
- Save
Citations (2)
Measurement of F−, O− and densities in 60 and 100 MHz asymmetric capacitively coupled plasma discharge produced in an Ar/O2/C4F8 gas mixture

2017 Journal of Physics D
Show All
- Source
- Cite
- Save
Citations (8)
Photo-detachment signal analysis to accurately determine electronegativity, electron temperature, and charged species density

2016 Applied Physics Letters
Show All
- Source
- Cite
- Save
Citations (10)
Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

2016 Physics of Plasmas
Show All
- Source
- Cite
- Save
Citations (30)
Measurement of nc-Si:H film uniformity and diagnosis of plasma spatial structure produced by a very high frequency, differentially powered, multi-tile plasma source

2015 Vacuum
Show All
- Source
- Cite
- Save
Citations (5)
Temporal evolution of electron density in a low pressure pulsed two-frequency (60 MHz/2 MHz) capacitively coupled plasma discharge

2014 Plasma Sources Science and Technology
Show All
- Source
- Cite
- Save
Citations (11)
Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 Journal of Physics D
Show All
- Source
- Cite
- Save
Citations (101)
Effect of radio-frequency power levels on electron density in a confined two-frequency capacitively-coupled plasma processing tool

2006 Applied Physics Letters
- S. K. Karkari
- A. R. Ellingboe
Show All
- Source
- Cite
- Save
Citations (53)