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Ho-Hyuk Lee
Ho-Hyuk Lee
SK Hynix
Extreme ultraviolet
Spite
Immersion lithography
Optics
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Patterning challenges of EUV lithography for 1X-nm node DRAM and beyond
2013
Proceedings of SPIE
Tae-Seung Eom
Hong Ik Kim
Choon-Ky Kang
Yoon-Jung Ryu
Seung-Hyun Hwang
Ho-Hyuk Lee
Hee-Youl Lim
Jeongsu Park
Noh Jung Kwak
Sungki Park
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Citations (7)
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