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Katalin Böőr
Katalin Böőr
Uppsala University
Materials science
Chemical vapor deposition
Microstructure
Metallurgy
principal element
2
Papers
5
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0
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Kinetics of the low-pressure chemical vapor deposited tungsten nitride process using tungsten hexafluoride and ammonia precursors
2021
Journal of Vacuum Science and Technology
Johan Gerdin Hulkko
Katalin Böőr
Ren Qiu
Olof Bäcke
Mats Boman
Mats Halvarsson
Erik Lindahl
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Chemical vapor deposition of TiN on a CoCrFeNi multi-principal element alloy substrate
2020
Surface & Coatings Technology
Katalin Böőr
Ren Qiu
Axel Forslund
Olof Bäcke
Henrik Larsson
Erik Lindahl
Mats Halvarsson
Mats Boman
Linus von Fieandt
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Citations (5)
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