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Y. Fujii
Y. Fujii
Tokyo Institute of Technology
Biasing
Oxide
Radical
Plasma
Thin film
1
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21
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Dominant species for oxidation of stainless steel surface in water vapor plasma
2006
Thin Solid Films
Toshihisa Suzuki
T. Saburi
R. Tokunami
H. Murata
Y. Fujii
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Citations (21)
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