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Toru Matsuyama
Toru Matsuyama
Optics
light intensity
Materials science
Resonance
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Nonlinear torque compensation of comb-driven micromirror
2003
MEMS | IEEE/LEOS International Conference on Optical MEMS
Yoshio Sakai
T. Yamabana
Satoshi Ide
Kazuyuki Mori
A. Ishizuka
O. Tsuboi
Toru Matsuyama
Y. Ishii
M. Kawai
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