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Rebecca Burgin
Rebecca Burgin
ON Semiconductor
Silicon nitride
Hydrogen chloride
Oxygen
Thin film
Oxidizing agent
2
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4
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Via resistance increase accelerated by thermal stress
2021
Microelectronics Reliability
Wentao Qin
Scott Donaldson
Dan Rogers
Chuck Belisle
Gordy Grivna
Lahcen Boukhanfra
Julien Thiefain
Denise Barrientos
Jim Steinwall
George Chang
Jeff Gambino
Rebecca Burgin
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Reoxidation of silicon nitride studied using x-ray photoelectron spectroscopy and transmission electron microscopy
2004
Journal of Applied Physics
Damien Gilmore
Will Z. Cai
Dorai Iyer
Rebecca Burgin
Guy Edwin Averett
Keith Kamekona
Sudhama C. Shastri
Brian Schoonover
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Citations (4)
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