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Shinichi Urabe
Shinichi Urabe
Tohoku University
Dielectric
Radical
Electron temperature
Capacitor
Physical vapor deposition
2
Papers
11
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0
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Ferroelectric Sr2(Ta1-x,Nbx)2O7 with a Low Dielectric Constant by Plasma Physical Vapor Deposition and Oxygen Radical Treatment
2003
Japanese Journal of Applied Physics
Ichirou Takahashi
Hiroyuki Sakurai
Atsuhiko Yamada
Kiyoshi Funaiwa
Kentaro Hirai
Shinichi Urabe
Tetsuya Goto
Masaki Hirayama
Akinobu Teramoto
Shigetoshi Sugawa
Tadahiro Ohmi
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Citations (7)
Oxygen radical treatment applied to ferroelectric thin films
2003
Applied Surface Science
Ichirou Takahashi
Hiroyuki Sakurai
Atsuhiko Yamada
Kiyoshi Funaiwa
Kentarou Hirai
Shinichi Urabe
Tetsuya Goto
Masaki Hirayama
Akinobu Teramoto
Shigetoshi Sugawa
Tadahiro Ohmi
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Citations (4)
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