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J. R. Brancaccio
J. R. Brancaccio
IBM
Process integration
Semiconductor device fabrication
Static random-access memory
Electrical engineering
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2
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Looking into the crystal ball: future device learning using hybrid e-beam and optical lithography (Keynote Paper)
2005
Steven E. Steen
Sharee J. McNab
Lidija Sekaric
Inna V. Babich
J. Patel
J. Bucchignano
Michael J. Rooks
David M. Fried
Anna W. Topol
J. R. Brancaccio
Roy Yu
John M. Hergenrother
James P. Doyle
Ronald W. Nunes
R. Viswanathan
Sampath Purushothaman
Mary Beth Rothwell
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Citations (12)
Looking into the crystal ball: future device learning using hybrid e-beam and optical lithography
2005
Steven E. Steen
Sharee J. McNab
Lidija Sekaric
Inna V. Babich
J. Patel
J.J. Bucchignano
Michael J. Rooks
David M. Fried
Anna W. Topol
J. R. Brancaccio
Roy Yu
J.M. Hergenrother
James P. Doyle
Ronald W. Nunes
R. Viswanathan
Sampath Purushothaman
Mary Beth Rothwell
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Cite
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