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X. Chauffleur
X. Chauffleur
Hoffmann-La Roche
Electronic engineering
Engineering
Analytical chemistry
Silicon
Thermal
5
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48
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Effect of membrane shape on mechanical behavior of RF switches
2004
Sensors and Actuators A-physical
X. Chauffleur
L. Rabbia
Patrick Pons
Katia Grenier
Robert Plana
L. Dantas
F. Flourens
J. Kuchenbecker
David Dubuc
Ali Boukabache
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Citations (6)
Design of MEMS-based microwave and millimeterwave switches for high power applications
2003
CAS | International Semiconductor Conference
B. Ducarouge
Etienne Perret
F. Flourens
Hervé Aubert
J.W. Tao
X. Chauffleur
J. P. Fradin
David Dubuc
Katia Grenier
Patrick Pons
Robert Plana
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Citations (4)
Intrinsic thermal behaviour of capacitive pressure sensors: mechanisms and minimisation
2000
Sensors and Actuators A-physical
G. Blasquez
X. Chauffleur
Patrick Pons
C. Douziech
P. Favaro
Ph. Ménini
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Citations (10)
A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits
1998
Sensors and Actuators A-physical
E. Saint-Etienne
Patrick Pons
G. Blasquez
P. Temple
Véronique Conédéra
M. Dilhan
X. Chauffleur
Ph. Ménini
Robert Plana
T. Parra
B. Guillon
J.C. Lalaurie
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Citations (19)
Influence of the bonding conditions on the response of capacitive pressure sensors
1995
Sensors and Actuators A-physical
X. Chauffleur
G. Blasquez
Patrick Pons
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Citations (9)
1