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K. Ikari
K. Ikari
Saga University
Magnet
Plasma
Atomic physics
Chemistry
Magnetic field
1
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High-density radio-frequency magnetized plasma sputtering source with rotational square-shaped arrangement of rod magnets for uniform target utilization
2016
Vacuum
Md. Amzad Hossain
Tsubasa Ide
K. Ikari
Yasunori Ohtsu
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