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okano sinzi
okano sinzi
Kyushu University
Inorganic chemistry
Chemistry
Computational chemistry
Dry etching
Metastability
2
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Chemical Dry Etching of Silicon by Discharge Flow of Ar/CF4 Gas Mixtures : Identification of Ar Active Species Responsible for the Formation of Etchant
2000
Engineering sciences reports, Kyushu University
tanaka atusi
Tanaka Atsushi
Okano Shinji
okano sinzi
Tsuji Masaharu
tuzi masazi
nisimura yukio
Nishimura Yukio
tanaka atusi
okano sinzi
tuzi masaharu
nisimura yukio
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Ar/CF4混合ガスの放電フロー中でのシリコンのケミカルドライエッチング : エッチャント生成に関与するAr活性種の同定
2000
Atsushi Tanaka
Shinji Okano
Masaharu Tsuji
Yukio Nishimura
tanaka atusi
okano sinzi
tuzi masazi
nisimura yukio
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