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Michikazu Morimoto
Michikazu Morimoto
Plasma
Materials science
Astronomy
Physics
Controllability
4
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4
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Controllability improvement of the etching rate distribution by pulse plasma
2018
The Japan Society of Applied Physics
Mamoru Yakushiji
Kenichi Kuwahara
Michikazu Morimoto
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Invited) Plasma Etching Technology Challenges for Future CMOS Fabrication Based on Microwave ECR Plasma
2015
Masaru Izawa
Motohiro Tanaka
Naoki Yasui
Michikazu Morimoto
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First 7-MILLIMETER VLBI Observations of the Peculiar Superluminal Radio Source 4C39.25
1993
Astronomy and Astrophysics
A. Alberdi
Th. P. Krichbaum
J. M. Marcaide
A. Witzel
D.A. Graham
Motoko Y. Inoue
Michikazu Morimoto
R. S. Booth
B.O. Ronnang
F. Colomer
Alan E. E. Rogers
J. Anton Zensus
Anthony C. S. Readhead
C. R. Lawrence
Rene Vermeulen
Norbert Bartel
I. I. Shapiro
Bernard F. Burke
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The SAGITTARIUS-B2 Region Seen at 43-GHZ
1987
Hiromi Hirabayashi
K. Akabane
Michikazu Morimoto
Yoshiaki Sofue
Makoto Inoue
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