Old Web
English
Sign In
Acemap
>
authorDetail
>
Hiroki Ohtaguro
Hiroki Ohtaguro
Optoelectronics
Materials science
Dram
optical image
Resist
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
CD uniformity improvement for sub 20 nm DRAM process with negative tone development
2020
Y C Lin
Mifong Wu
Le Wang
Baijun Sun
Hiroki Ohtaguro
Takeshi Shimoaoki
Yusaku Hashimoto
Koichi Hontake
Show All
Source
Cite
Save
Citations (0)
1