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J-L. Leclercq
J-L. Leclercq
École centrale de Lyon
Analytical chemistry
X-ray photoelectron spectroscopy
Surface roughness
Inductively coupled plasma
Plasma
4
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21
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Realization of a tunable near infra red InP / InGaAs QWs based photodetector integrated in a MOEMS structure for micro-spectrometer applications
2009
IPRM | International Conference on Indium Phosphide and Related Materials
O. Parillaud
O. Huet
J. Decobert
Michel Garrigues
R. Gil-Sobraques
J-L. Leclercq
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Citations (1)
InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides
2006
Materials Science in Semiconductor Processing
B. Liu
J.P. Landesman
J-L. Leclercq
A. Rhallabi
C. Cardinaud
S. Guilet
F. Pommereau
M. Avella
M.A. Gonzalez
J. Jiménez
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Citations (8)
Surface chemistry of InAlAs after (NH4)2Sx sulphidation
1995
Semiconductor Science and Technology
J-L. Leclercq
E. Bergignat
G. Hollinger
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Citations (12)
1