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Alexey Y. Kovalgin
Alexey Y. Kovalgin
MESA+ Institute for Nanotechnology
Analytical chemistry
Atomic layer deposition
Thin film
Chemistry
Chemical vapor deposition
7
Papers
11
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Conduction and electric field effect in ultra-thin tungsten films
2020
IEEE Transactions on Semiconductor Manufacturing
Kees van der Zouw
Antonius A.I. Aarnink
Jurriaan Schmitz
Alexey Y. Kovalgin
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Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
2020
Journal of Vacuum Science and Technology
Ramazan Oguzhan Apaydin
Arnoud J. Onnink
Xingyu Liu
Antonius A.I. Aarnink
Michel P. de Jong
Dirk J. Gravesteijn
Alexey Y. Kovalgin
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Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy
2020
Journal of Vacuum Science & Technology B
Arnoud J. Onnink
Ramazan Oguzhan Apaydin
Antonius A.I. Aarnink
Michel P. de Jong
Dirk J. Gravesteijn
Alexey Y. Kovalgin
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Citations (2)
Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride
2019
Journal of Physical Chemistry C
Sourish Banerjee
Antonius A.I. Aarnink
Dirk J. Gravesteijn
Alexey Y. Kovalgin
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Citations (6)
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