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W.M. Park
W.M. Park
Samsung
Electronic engineering
Ion implantation
Chemical-mechanical planarization
LOCOS
Transistor
2
Papers
6
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Micro villus patterning (MVP) technology for 256 Mb DRAM stack cell
1992
VLSIT | Symposium on VLSI Technology
Jung Chak Ahn
Young Kwan Park
Jai Kwang Shin
Sutae Kim
Sangwoo Shim
Seo-Woo Nam
W.M. Park
Hong-jae Shin
Chel-Jong Choi
K. Kim
D. Chin
Oh-seong Kwon
C. G. Hwang
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Citations (5)
LOCOS-based isolation for 0.5 mu m device with PLD (polysilicon-spacered lateral diffusion) technology
1991
VLSI-TSA | International Symposium on VLSI Technology, Systems, and Applications
W.S. Paik
T.Y. Jang
W.M. Park
W.T. Choi
S.G. Yang
J. H. Shin
Young-wan Kim
K.S. Oh
O.H. Kwon
Y.E. Park
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Citations (1)
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