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B. van Drieenhuizen

ASML Holding

3

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11-Megapixel CMOS-Integrated SiGe Micromirror Arrays for High-End Applications

2010 IEEE\/ASME Journal of Microelectromechanical Systems
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Packaging of 11 MPixel CMOS-Integrated SiGe Micro-Mirror Arrays

2009 MEMS | International Conference on Micro Electro Mechanical Systems
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