Old Web
English
Sign In
Acemap
>
authorDetail
>
U. Seidel
U. Seidel
Infineon Technologies
Thin film
Silicon nitride
Dielectric strength
Analytical chemistry
Aerogel
1
Papers
12
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Improvement of mechanical integrity of ultra low k dielectric stack and CMP compatibility
2004
Microelectronic Engineering
K. Schulze
Stefan Schulz
S. Frühauf
Heinrich Körner
U. Seidel
D Schneider
T. Gessner
Show All
Source
Cite
Save
Citations (12)
1