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Boris Vasilev

Qimonda

10

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86

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Intraoperative Radiotherapy with Balloon-Based Electronic Brachytherapy System—A Systematic Review and First Bulgarian Experience in Breast Cancer Patients

2021 Current Oncology
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CRIC: Computing Resource Information Catalogue as a unified topology system for a large scale, heterogeneous and dynamic computing infrastructure

2020
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Researches of processes of generation of sound waves by film thermophones

2018
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Pad roughness evolution during break-in and its abrasion due to the pad-wafer contact in oxide CMP

2013 Microelectronic Engineering
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A method for characterizing the pad surface texture and modeling its impact on the planarization in CMP

2013 Microelectronic Engineering
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Greenwood–Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP

2011 IEEE Transactions on Semiconductor Manufacturing
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Pad roughness effects on the planarization and material removal rate in CMP processes

2011 IITC | International Interconnect Technology Conference
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Greenwood-Williamson Model for Pattern-Dependent Planarization

2007
- Roland Rzehak
- Boris Vasilev
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Citations (6)