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Trina Riley
Trina Riley
Advanced Micro Devices
Lithography
Process control
Engineering
Metrology
Excursion
2
Papers
7
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Sampling plan optimization for detection of lithography and etch CD process excursions
2000
Richard C. Elliott
R.K. Nurani
Sung Jin Lee
Luis G. Ortiz
Moshe E. Preil
J.G. Shanthikumar
Trina Riley
Greg Goodwin
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Citations (5)
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